论文总字数：17850字

摘 要

检测过程快速、操作简单、可重复、样品无损，这是拉曼光谱分析技术的特点与优势，拉曼光谱可以用来研究分子组成和分子的各种性质以及分子随环境变化的微现象。它不需要提前进行准备样品，因为拉曼光谱仪可以利用石英玻璃或者利用光纤探头对样品直接测量。另外水相比其他物质的拉曼散射是很微弱的，对水溶液中其他物质的检测几乎不造成影响。所以拉曼光谱相比其他光谱对检测环境的要求更低，是研究或检测生物或化学实验中溶剂为水的物质的相当不错的方法。综上所述，拉曼光谱技术在化学、化工、高分子材料、药物、刑侦生物和医学，食品、珠宝、材料、地质、考古、环境等领域都有巨大应用前景^[1]。

随着光学器件尺寸从毫米级进一步减小到微米、纳米量级，原有的光学制造技术和元件已渐渐不适于对性能要求越来越高的光学系统，需要采用新的光学元件来优化系统才能使光学仪器或工具达到更好的使用效果。微机电系统（或微电子机械系统，英文Micro Electro-Mechanical System）是一个基于微电子技术发展起来的多学科交叉的新兴学科，它是以材料科学、微机械及微电子为基础，研究、设计、制造具有特定功能的微型装置，包括微系统、微传感器、微操作器和微结构器件等^[2]。美国德州仪器公司利用在基片的牺牲层上淀积一层结构层然后加工出所需图形的工艺手法，研究制成了像素为2048*1152的数字芯片。随着对数字微镜芯片的研究，它已经被应用于光学领域中的很多部分，将光信号数字化，使得信息收集和数据处理更加方便，易于控制。

本文主要研究了先进光控制在拉曼光谱仪中的应用探索，使其结构优化，成本降低，质量提高，更加广泛地应用于各种领域。

关键词：拉曼光谱；数字微镜DMD；光路结构；微机电系统

Application of advanced optical control in Raman spectrometer

Abstract

The rapid detection process, simple operation, repeatability and sample nondestructive are the characteristics and advantages of Raman spectroscopy. It does not need to prepare samples in advance, because Raman spectrometer can use quartz glass or fiber probe to measure samples directly. In addition, the Raman scattering of water is very weak compared with other substances, which has little effect on the detection of other substances in aqueous solution. Therefore, compared with other spectra, Raman spectroscopy has lower requirements on the detection environment. It is an ideal method to study or detect biological samples and chemical compounds in aqueous solution. In conclusion, Raman spectroscopy technology has great application prospects in the fields of chemistry, chemical industry, polymer materials, drugs, criminal investigation biology and medicine, food, jewelry, materials, geology, archaeology, environment and so on.

With the size of optical devices further reduced from millimeter level to micrometer and nanometer level, the original optical manufacturing technology and components are gradually not suitable for optical systems with higher and higher performance requirements. It is necessary to use new optical components to optimize the system in order to achieve better use effect of optical instruments or tools. Micro electro mechanical system System) is a new interdisciplinary subject based on the development of microelectronics technology. It is based on material science, micro machinery and microelectronics, research, design and manufacture of micro devices with specific functions, including micro systems, micro sensors, micro operators and micro structure devices. Texas Instruments Corporation of the United States uses the technology of depositing a layer of structural layer on the sacrificial layer of the substrate and then processing the required graphics to research and make a 2048 * 1152 digital driving micro mirror array chip. This new digital micro mirror chip is used for projection display device, and the use of this chip makes a breakthrough in the projection industry. With the research of the digital micro mirror chip, it has been applied to many parts of the optical field. The digital optical signal makes the information collection and data processing more convenient and easy to control. In this paper, the application of advanced optical control in Raman spectrometer is studied, which can optimize the structure, reduce the cost, improve the quality, and be widely used in various fields.

Key Words: Raman spectra；Digital micromirrorDMD；Optical path structure； Micro Electro Mechanical Systems

目 录

摘 要 I

Abstract II

第一章 引言 1

1.1拉曼光谱仪概述 1

1.2拉曼光谱仪的应用与光谱技术 1

1.2.1拉曼光谱仪的应用 1

1.2.2几种重要的拉曼光谱分析技术 2

1.3先进光控制的研究现状 5

1.4本文主要工作 5

第二章 拉曼光谱仪的原理与结构分析 7

2.1拉曼光谱仪检测原理 7

2.2拉曼光谱仪的系统组成 8

2.2.1激光光源 9

2.2.2样品装置 9

2.2.3滤光器 9

2.2.4单色器（或干涉仪 9

2.2.5检测器 10

第三章 基于DMD的拉曼光谱仪的结构设计与研究 11

3.1DMD工作原理 11

3.2拉曼光谱仪应用DMD的系统结构设计 12

3.2.1系统结构设计说明 12

3.2.2应用DMD的优势 14

第四章 硬件设计与平台搭建展示 16

4.1硬件设计 16

4.2平台搭建展示 16

4.3实验结果 18

第五章 总结与展望 19

5.1本文工作总结 19

5.2下一步工作计划 19

参考文献 21

致谢 23

第一章 引言

1.1拉曼光谱仪概述

拉曼光谱仪最基础的原理是拉曼散射现象,这一现象简单描述就是当光穿过透明介质被分子散射的光发生频率变化^[3]。这个的意外发现使研究各种物质的分子结构领域多了一种重要的工具，并且随着与拉曼光谱仪配合完成检测的其他技术例如分光技术和感光技术的崛起，检测结果的可信度提高，从此拉曼光谱技术受到广泛的重视。拉曼效应发现人是C.V.拉曼，他是印度科学家。

后来因为拉曼光谱技术本身存在散射后亮度太弱(约为入射光强的10^-6)的问题而且技术不发达没有好的解决办法，并且对被测样品的要求也比较苛刻，体积必须够大、没有颜色、没有杂尘和杂光等，拉曼光谱技术渐渐不被使用。后来红外技术得到改进并广泛使用加重了人们对拉曼光谱的应用大幅度减少。

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