论文总字数：19106字

摘 要

在现代社会生活领域里，随处可见压电材料的应用，压电薄膜材料的致密度高、容易存储、高度集成等优点，更有利于和集成电路相结合。传统的含铅压电材料会在制备生产过程中会释放铅元素，对自然环境造成严重的污染。随着全社会对生态环境保护越来越重视，生态环境就是生态经济，正如习总书记说的青山绿山就是金山银山，因此，人们迫切需要研究开发一种新型环保无铅压电材料来取代传统的有污染的含铅压电材料，这将会具有重大的社会经济效益。相比于其他的无铅压电材料,Bi_0.5Na_0.5TiO₃因其自身具有环保等独特的性能，成为了众多专家学者眼中完美的且重点研究的无铅压电材料。本论文主要使用溶胶凝胶法制备钛酸铋钠基无铅压电薄膜并分析其物相，微观形貌等性能。研究了钛酸铋钠基无铅压电薄膜的制备工艺，实验了在一定的退火温度范围内，不同的前驱体溶液浓度，对薄膜微观形貌，物相，性能的影响。以及不同的掺杂量对薄膜漏电流密度的影响。

关键词：钛酸铋钠，溶胶凝胶法，前驱体溶液，退火温度

Abstract

In the field of modern social life,the application of piezoelectric materials can be seen everywhere. The advantages of piezoelectric thin film materials such as high density, easy storage, and high integration are more conducive to the integration with integrated circuits. Lead-containing piezoelectric materials will release lead during the production process, causing serious pollution to the natural environment. As the whole society pays more and more attention to ecological and environmental protection, the ecological environment is the ecological economy. As General Secretary Xi said, the green mountains and green mountains are the Jinshan and Yinshan. Replacing traditional contaminated lead-containing piezoelectric materials will have significant social and economic benefits. Compared with other lead-free piezoelectric materials, Bi_0.5Na_0.5TiO₃ has become a perfect lead-free piezoelectric material in the eyes of many experts and scholars due to its unique environmental protection and other unique properties. In this thesis, sol-gel method is mainly used to prepare lead-free piezoelectric thin film based on sodium bismuth titanate and its phase, micro-morphology and other properties were analyzed. The preparation process of bismuth titanate-based lead-free piezoelectric films was studied. The effects of different precursor solution concentrations on the film morphology, phase and properties within certain annealing temperatures were tested. And the effect of different doping levels on the film leakage current density was studied as well.

Key Words：Bismuth sodium titanate, sol-gel method, precursor solution, annealing temperature

目录

摘要 - Ⅰ--

Abstract - Ⅱ -

第一章 绪论 --1- -

1.1 无铅压电薄膜材料的基本介绍 - 1 -

1.1.1无铅压电薄膜材料的简介 1--

1.1.2 无铅压电薄膜材料的发展 - 1 -

1.1.3 无铅压电薄膜材料的研究背景 - 2 -

1.1.4 无铅压电材料的种类及特点 - 2 -

1.2 钛酸铋钠基无铅压电薄膜材料的简介及研究情况 - 3 -

1.2.1 Bi_0.5Na_0.5TiO₃基简介 - 3 -

1.2.2 钛酸铋钠基无铅压电薄膜的研究现状 - 3 -

1.3 铁电薄膜的前景 - 5 -

1.4 钛酸铋钠基无铅压电薄膜的制备方法 - 6 -

1.4.1 Sol-Gel法 - 6 -

1.4.2 固相合成法 - 6 -

1.4.3 脉冲激光沉积法（PLD） - 7 -

1.4.4 磁控溅射沉积法 - 8 -

1.5 本论文研究的目的和主要内容 - 7 -

1.6 本章总结 - 7 -

第二章 钛酸铋钠基无铅压电薄膜的制备和测试方法 - 8 -

2.1 实验部分 - 8 -

2.2 钛酸铋钠基无铅压电薄膜材料的表征 - 10 -

2.2.1 形貌分析 - 10 -

2.2.2 物相分析 - 11 -

2.2.3 电学性能测试与分析 - 11 -

2.3 本章总结 - 11 -

第三章 实验结果与讨论 12--

3.1 不同的退火温度对薄膜材料的微观形貌和物相的影响 - 12 -

3.2 不同的退火温度对薄膜材料电学性能的影响 - 15 -

3.3 Mn掺杂对钛酸铋钠基无铅压电薄膜的漏电流密度的影响 - 16 -

3.4 本章总结 - 17 -

第四章 结论与展望 - 18 -

4.1 结论 - 18 -

4.2 展望 - 19 -

参考文献 - 20 -

致谢 -22- -

第一章 绪论

1.1 无铅压电薄膜材料的基本介绍

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