论文总字数：19215字

摘 要

在当今社会，电子信息技术发展越来越迅速，而LTCC(Low Temperature Co- fired Ceramic)材料和器件技术可以满足现代电子封装领域向着小型化、轻薄化，多功能化的方向发展，已经成为很具有发展前途的电子技术。但是同时随着人们和国家对电子技术和信息数字化产品的要求越来越大，对LTCC材料的要求在原有的基础上也不断提高。

本论文在课题组以前的工作基础上，进一步细化研究钙硼硅多元组分对CBS微晶玻璃的性能影响。固定B₂O₃的含量，通过对含有不同Ca/Si比值微晶玻璃的形态、烧结性能以及介电性能的研究来探索Ca/Si比值对于CBS微晶玻璃的性能影响。经过以下的实验步骤进行实验：1.配制CBS微晶玻璃粉体，细磨至一定的粒径，加入各种有机添加剂配成流延浆料；2.在流延机上进行流延成型，经干燥成型之后进行压片、烧成；3.把烧成好的样品通过仪器进行性能测试、结果整理分析，得出结论：

锆球的球磨效果要好于锆柱，且Ca/Si比值在0.61～0.62之间可透明度较好的微晶玻璃并可以在850℃以下实现致密化；在各试样都在实现致密化时，达到最高密度的温度点处，介电常数也为最高值，同时介电损耗最小。当Ca/Si比值为0.61，B₂O₃含量为15.5mol%时，其在850℃下的烧结密度为2.42g/cm³，在10kHz频率下测得介电常数ε_r=5.88，介电损耗 tanδ=2.8×10^-3。

关键词：LTCC CBS微晶玻璃 流延成型

Abstract

In today's society, the development of electronic information technology is more and more rapid, LTCC (Low Temperature Co-fired Ceramic) materials and device technologies can meet the trend of miniaturization, lighter direction, and centralized function in the field of modern electronic packaging. , has become very promising electronic technology. However, at the same time as people and countries are increasingly demanding electronic technology and information digital products, the requirements for LTCC materials are constantly increasing.

Based on the previous work of the research group, this chapter further studies the effect of calcium borosilicate multicomponent on the performance of CBS glass-ceramics. First fix the content of B₂O₃, explore the effect of the Ca/Si ratio on the performance of CBS glass-ceramics by studying the morphology, sintering properties and dielectric properties of glass-ceramics with different Ca/Si ratios.After the following experimental steps to carry out the experiment: 1. Preparation of CBS glass-ceramic powder, grinding to a certain particle size, adding various additives into a slurry; 2. Casting is performed on a casting machine, followed by dry forming followed by tableting and firing; 3. Passing the fired sample through the apparatus Perform performance tests, collate the results, and draw conclusions.

The crystallized glasses with better Ca/Si ratio between 0.61 and 0.62 can be densified below 850°C. The densification of all samples is achieved. At the highest density point, the dielectric constant is also The highest value, while the minimum dielectric loss. When the Ca/Si ratio is 0.61 and the B₂O₃ content is 15.5%, the sintered density at 850°C is 2.42 g/cm³, the dielectric constant εr=5.88 measured at a frequency of 10 kHz, and the dielectric loss tanδ=2.8×10 ^-3.

Key words:LTCC; CBS Glass-ceramics; Tape Casting

目 录

摘 要 I

Abstract II

第一章 绪论 1

1.1 LTCC概述 1

1.1.1 陶瓷低温烧结的途径 2

1.1.2 流延成型 3

1.1.3陶瓷粉体 4

1.1.5 分散剂 4

1.1.6 粘结剂 4

1.1.7 增塑剂 5

1.2 LTCC的研究进展 5

1.3 CBS微晶玻璃材料及器件发展方向 5

1.4论文研究背景 6

第二章 实验部分 7

2.1实验仪器 7

2.2 实验试剂 8

2.3实验内容 8

2.3.1制备CBS玻璃粉末的准备阶段 8

2.3.2实验流程 9

2.3.3试样烧成 10

2.4体积密度测试 10

2.5介电性质测试 11

第三章 数据处理与讨论结果 12

3.1粉体粒径对CBS性能的影响 12

3.1.1研磨的介质和时间对粒的影响 12

3.1.2粉料粒径对CBS微晶玻璃性能的影响 13

3.2 Ca/Si比对CBS微晶玻璃的性能影响 14

3.2.1 Ca/Si比对CBS微晶玻璃表面形貌状态的变化图 15

3.2.2 Ca/Si比对CBS微晶玻璃烧成性能的影响 17

3.2.3 Ca/Si比对CBS微晶玻璃介电性能的影响 19

第四章 结论 21

参考文献 22

致 谢 24

第一章 绪论

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