论文总字数：17522字

摘 要

近年来由于科技的发展迅速，电子器件的柔韧性已经越来越受到科学家们的关注，以高分子材料为基底的光电器件发展迅猛。由于高分子材料聚酰亚胺（PI）具有良好的耐高温性和柔韧性，在柔性器件中被广泛应用作为基底材料，另外由于半导体材料ZnO的介电常数为8.7，禁带宽度3.4，具有优良的性能。在PI上沉积ZnO薄膜材料的制备是一个非常值得研究的课题。

本文采用分别采用热喷雾分解法以及旋涂法在PI上制备ZnO薄膜材料。采用热喷雾分解法制备PI/ZnO薄膜主要研究了喷雾功率对PI/ZnO薄膜性能的影响；采用旋涂法制备PI/ZnO薄膜，首先用水热法制备ZnO悬浮液，采用相应的悬浮液进行旋涂，研究溶液PH值以及水热反应时间对PI/ZnO薄膜性能的影响。

实验采用XRD检测、红外吸收光谱，紫外分光计透射光谱对材料进行表征，研究结果表明：

（1）通过热喷雾法在PI上制备了ZnO薄膜时，在喷雾的时间35min、加热温度210℃的前提下，喷雾的功率为6w时制备出的薄膜的性能较好，透光性达到90%。

（2）使用水热法制备ZnO纳米颗粒时，在水热时间10h和水热温度180℃的前提下，当二水合乙酸锌和尿素的配比为1:4时，制备出的ZnO纳米颗粒结晶程度更好，颗粒较小。

（3）利用旋涂法在PI上制备了ZnO薄膜时，在水热时间8h、水热温度180℃、退火温度180℃、时间30min以及旋涂工艺相同的前提下，当二水合乙酸锌和尿素的配比为1:4时，制备出的薄膜的结晶性最好，透光性达到60%。

关键词：聚酰亚胺 氧化锌 热喷雾 旋涂

Preparation and Properties of ZnO Thin Films on PI

Abstract

In recent years, due to the rapid development of science and technology, the flexibility of electronic devices has attracted more and more attention from scientists, and photovoltaic devices based on polymer materials have developed rapidly.Due to the high temperature resistance and flexibility of polyimide (PI) polymer material, it is widely used as a base material in flexible devices. In addition, due to the excellent performance of semiconductor material ZnO, the preparation of ZnO film material deposited on PI. It is a very worthwhile research topic.

In this paper, ZnO thin film materials were prepared on PI by thermal spray decomposition method and spin coating method, respectively. The effect of spray power on the performance of PI/ZnO thin films was studied by thermal spray decomposition method. The PI/ZnO thin films were prepared by spin coating method. Firstly, ZnO suspension was prepared by hydrothermal method and the corresponding suspension was used to spin. The effects of coating, pH of the solution and hydrothermal reaction time on the performance of the PI/ZnO film.

XRD detection, infrared absorption spectroscopy and ultraviolet spectrometer transmission spectroscopy were used to characterize the material. The results showed that:

1. When the ZnO thin film was prepared on PI by thermal spraying method, under the premise of spraying time of 35min and heating temperature of 210°C, the performance of the thin film prepared when the spraying power was 6w was good, and the light transmittance reached 90 %.
2. When ZnO nanoparticles were prepared by hydrothermal method, under the premise of hydrothermal time of 10h and hydrothermal temperature of 180°C, when the ratio of zinc acetate dihydrate and urea was 1:4, ZnO nanoparticles were prepared. The crystallinity is better and the particles are smaller.
3. When the ZnO thin film was prepared on PI by spin coating, the zinc acetate dihydrate was mixed with urea under the premise of hydrothermal time 8h, hydrothermal temperature 180°C, annealing temperature 180°C, time 30min, and spin coating process. When the ratio is 1:4, the prepared film has the best crystallinity and the light transmittance reaches 60%.

Key Words: PI; ZnO; Hot spray; Spin coating

目录

摘要 I

ABSTRACT II

第一章 绪论 1

1.1 引言 1

1.2 新型柔性器件构造 1

1.3 新型柔性基底薄膜材料 2

1.4 氧化锌半导体材料 2

1.5 柔性薄膜器件制备方法 3

1.6 本课题的研究目的与内容 4

第二章 样品的制备和表征 4

2.1 实验设备和程序 4

2.2 样品的测试与表征技术 8

第三章 实验结果与讨论 9

3.1 喷涂法制备的PI基Zno薄膜的表征 10

3.2 水热法制备纳米Zno颗粒的表征 12

3.3 旋涂法制备的PI基Zno薄膜的表征 14

第四章 总结与展望 16

4.1 总结 16

4.2 展望与不足 17

参考文献 17

致谢 19

第一章 绪论

1.1 引言

如今，电子器件正从笨重和刚性逐步变的轻巧灵活。这一发展导致（从智能纺织品到皮肤柔性器件）涵盖可穿戴设备各个方面的新应用电子产品的产生，基于非晶硅、有机物、氧化物半导体的可弯曲的电子器件已经通过使用高分子材料衬底而被实现。

新型柔性光电子器件对基体主要有以下几点要求（1）具有良好的透光性；（2）具有优异的耐热性；（3）衬底与薄膜之间具有良好的粘附性。一般实验室用的柔性基底薄膜都是塑料性薄膜，包括如聚酰亚胺(PI)薄膜、聚二甲基硅氧烷( PDMS)、聚酯(PET)等。

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