利用椭偏仪测定薄膜孔径分布任务书
2020-06-25 20:51:55
1. 毕业设计(论文)的内容和要求
查阅相关文献与专业书籍了解目前椭圆偏振光谱仪对薄膜孔径分布测试的研究现状,了解此课题相关背景,了解碳纳米管薄膜的相关应用,已有成果以及存在的问题,对论文的研究方向有较深入的认识。
培养学生独立思考及动手做实验的能力,养成良好的科研习惯。
学会查找和阅读文献;学会应用相关实验设备和分析仪器。
2. 参考文献
(1) Dultsev, F. N., and M. R. Baklanov. "Nondestructive determination of pore size distribution in thin films deposited on solid substrates." Electrochemical and solid-state letters 2, no. 4 (1999): 192-194. (2) Baklanov, M. R., K. P. Mogilnikov, V. G. Polovinkin, and F. N. Dultsev. "Determination of pore size distribution in thin films by ellipsometric porosimetry." Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 18, no. 3 (2000): 1385-1391. (3) Ogieglo, Wojciech, Herbert Wormeester, Klaus-Jochen Eichhorn, Matthias Wessling, and Nieck E. Benes. "In situ ellipsometry studies on swelling of thin polymer films: A review." Progress in polymer science 42 (2015): 42-78. (4) Ogieglo, Wojciech, Hans van der Werf, Kristianne Tempelman, Herbert Wormeester, Matthias Wessling, Arian Nijmeijer, and Nieck E. Benes. "n-Hexane induced swelling of thin PDMS films under non-equilibrium nanofiltration permeation conditions, resolved by spectroscopic ellipsometry." Journal of membrane science 437 (2013): 313-323. (5) Yang, Jie, Ling Tong, Yang Yang, Xiaoqiang Chen, Jun Huang, Rizhi Chen, and Yong Wang. "Selective-swelling-induced porous block copolymers and their robust TiO 2 replicas via atomic layer deposition for antireflective applications." Journal of Materials Chemistry C 1, no. 33 (2013): 5133-5141. (6) Mogilnikov, Konstantin P., Dongchen Che, Mikhail R. Baklanov, Kangning Xu, and Kaidong Xu. "Review of thin film porosity characterization approaches." In Semiconductor Technology International Conference (CSTIC), 2017 China, pp. 1-4. IEEE, 2017. (7) Ogieglo, Wojciech, Ingo Pinnau, and Matthias Wessling. "In-situ non-invasive imaging of liquid-immersed thin film composite membranes." Journal of Membrane Science 546 (2018): 206-214. (8) Wang, Yong. "Nondestructive creation of ordered nanopores by selective swelling of block copolymers: Toward homoporous membranes." Accounts of chemical research 49, no. 7 (2016): 1401-1408. (9) George, Steven M. "Atomic layer deposition: an overview." Chemical reviews 110, no. 1 (2009): 111-131. (10) Leskel#228;, Markku, and Mikko Ritala. "Atomic layer deposition chemistry: recent developments and future challenges." Angewandte Chemie International Edition 42, no. 45 (2003): 5548-5554.
3. 毕业设计(论文)进程安排
2017. 2. 22 ~ 2017. 3. 15:查阅文献。
查阅国内外文献,确定实验方法和实验条件,并按文献进行摸索性的尝试; 2017. 3. 15 ~ 2017. 4 .1:利用课题组已有基础,首先制备嵌段共聚物薄膜(PS-b-P2VP),然后采用原子层沉积(ALD)法对其进行改性; 2017. 4. 1 ~ 2017. 5. 30:利用椭偏仪环境池单元进行孔径分布的测试;2017. 6. 1 ~ 2017. 6. 10:对所得的表征结果进行分析,完成毕业设计的相关内容。