摘 要

针对多路微夹钳的控制目的，学习了有关压电微夹钳的知识，以单片机和相关硬件电路为基础，结合上位机设计了一个针对压电微夹钳的控制单元。并以单片机为核心，使用CD4051多路开关和AD0809模数转换器等硬件元件，设计了硬件电路中的多路控制电路和采集电路。对各个模块的工作原理作了分析,介绍了各模块硬件电路的连接方法。后面对整体系统程序进行分析，并对各模块的程序流程做了设计。设计出的集成控制单元可以在上位机的操作下选择多路微夹钳中的某一路，并对其进行控制后再控制其它路压电微夹钳。

关键词：压电微夹钳；单片机；控制

Abstract

In view of the multiple micro clamp control purposes, i learned the knowledge about piezoelectric micro clamp. This paper designed a piezoelectric micro clamp for the control unit which based on the MCU and the related hardware circuit and combined with the upper machine.

The design use CD4051 multiway switch and AD0809 adc hardware components to design the hardware circuit of the multi-channel control circuit and sampling circuit witch based on MCU. Analyzes the working principle of various modules and each module hardware circuit connection method are introduced. The overall system program were analyzed and the program flow of every module was designed.The control unit can choose one of the multiple under the operation of upper machine and control it.

Key Words：Piezoelectric micro clamp ；MCU ；Control

目 录

第1章 绪论·································································1

1.1 研究背景·······························································1

1.2 国内外研究现状·························································1

1.3 论文主要内容和结构·····················································3

第2章 设计方案·····························································4

2.1 设计基础分析···························································4

2.2 方案分析·······························································5

2.2.1 压电微夹钳的基本控制方法············································5

2.2.2 驱动电源及通信技术··················································5

2.2.3 多路控制功能························································6

第3章 硬件电路设计·························································7

3.1 单片机芯片·····························································7

3.2 单片机最小系统·························································8

3.3 通信电路·······························································8

3.4 可编程直流电源·························································9

3.5 多路开关······························································10

3.6 电压采集转换··························································11

第4章 控制程序设计························································14

4.1 整体控制程序需求分析··················································14

4.2 主控制程序设计························································14

4.3 驱动电源程序流程······················································16

4.4 A/D采集程序·························································17

第5章 实验模拟·····························································18

5.1 硬件电路搭建··························································18

5.2 实验模拟结果··························································18

第6章 总结································································21

参考文献···································································22

致谢·······································································23

第1章 绪论

• 1. 研究背景

微电子技术和集成电路这两项技术在20世纪60年代得到了快速发展，它们已成为人类文明发展的重要基础。微纳米技术在此基础上应运而生，在世界高新技术领域中微纳米技术属于新兴的多学科交叉技术，涉及到了电子和机械等多个专业学科方面的知识。但是在微纳米级别上的制造技术中，对微动机械系统的操作要求十分细微。重要的是在微操作系统中微夹钳技术的使用最为广泛，由此可以看出微夹钳等微操作技术的对于微电子机械装配系统重要性，所以微夹钳及其相关的研究已经是国内外微机械研究领域的一个重要课题^[1~2]。

另外一方面机器人技术是一门综合性技术,它在近几十年来也得到了快速发展，它综合了多个学科的最新科研技术,包括计算机科学和机械学等多方面的知识成果。在世界范围内，有关机器人的研究、制造及应用已经被越来越多的国家所重视。随着高新科学技术的快速发展，在微机电工程以及精密制造等技术领域的发展需求下，机械装配过程迫切需求人们可以开发一些操作的对象是细小物体的微细作业技术。但是这项操作直接由人来实现是很困难的,因为操作的对象是精细级别的，人的肉眼和手无法达到要求，所以很需要能够找到一种可以代替人类进行这类操作的机器人系统。因此，微型机器人技术出现在了人们面前，这一项技术成为了当今世界机器人研究发展最为活跃的领域之一^[3]。