全文总字数：6751字

气体微传感器的电极优化设计及有限元仿真文献综述

摘要

当今社会，随着MEMS技术越来越成熟，微传感器应用越来越广泛，电极结构是气体微传感器元件的重要组成部分，微型气体传感器主要是利用涂覆在器件上的敏感材料与被检测气体发生效应进而改变输出电压信号的原理来工作的，而敏感材料的性能要达到完全发挥需要加热以达到指定的温度，这个工作由元件中的微热板电极来完成。微热板电极的设计应该考虑使器件温度分布均匀，功耗低、输出稳定。利用ANSYS有限元分析工具对微结构传感器的微热板电极的结构设计进行仿真，通过仿真得到的结果和数据，对器件的电极结构和尺寸进行优化。

关键词：气体微传感器、电极、有限元仿真、ANASYS

Abstract

In today#39;s society, with MEMS technology is more and more mature, and micro sensors are more and more widely used. Electrode structure is an important part of gas micro sensors. Micro gas sensors mainly use the principle that the sensitive material coated on the device has an effect on the detected gas, and then changes the output voltage signal. In order to fully play the performance of sensitive materials, heating is needed to achieve the target This is done by the micro hotplate electrode in the element. The design of micro hotplate electrode should consider the uniform temperature distribution, low power consumption and stable output. ANSYS finite element analysis tool is used to simulate the structure design of the electrode of the micro structure sensor. Through the simulation results and data, the electrode structure and size of the device are optimized.

Key words: gas micro sensor, electrode, finite element simulation, ANASYS

一：气体微传感器及其电极研究背景