论文总字数：26212字

摘 要

超长分布的阵列微结构是一种难加工的零件结构，其分布尺寸长、结构特征尺寸小，加工过程中由于尺寸过长导致可能无法保证加工的一致性，加工效率不高。活动掩膜电解加工是以电化学阳极溶解理论基础，在工件上加工出与模板上的结构相同或者相似的一种电解加工方式。针对此类结构的特点，本课题设计一种连续进给式的掩模电解加工工艺装配，通过特定的机械传动装置，实现掩模和工件的连续精确进给，使得超长阵列微结构可以连续电解加工，提高其加工精度和加工效率。

连续进给式掩膜电解加工工艺有着独到的优越性，本文设计出一道工艺装备以实现连续进给式掩膜电解加工。本文主要对下列几个方面做了详细的研究：

1.介绍连续进给式掩膜电解加工的原理以及其工艺方式。

2.设计加工过程中所需要的的工艺装备尺寸以及各个零部件的尺寸大小。

3.校核在加工过程中各个部件所承受力的强度要求。

4.分析其工艺装备的经济性。

综上所述，本文关于连续进给式掩膜电解加工工艺装备的设计主要有以上四个方面，通过上述的研究，可以简单的了解本文所设计的工艺装备以及该工艺装备的优缺点。

关键词：连续进给；掩膜电解加工；超长分布的阵列微结构。

ABSTRACT

The ultra long distributed array microstructure is a kind of hard to machine part structure, which has long distribution size and small structure feature size. It is difficult to guarantee the machining consistency and low efficiency in the process of machining. Based on the theory of electrochemical anode dissolution, the active mask pulse electrochemical machining is a special processing technology which uses the selected area of the template to limit the area of the workpiece to be eroded, and processes the similar structure of the group hole area on the workpiece with the template. According to the characteristics of this kind of structure, a kind of continuous feeding mask electrochemical machining process assembly is designed in this paper. Through a specific mechanical transmission device, the mask and workpiece can be continuously and accurately fed, so that the ultra long array microstructure can be continuously electrochemical machining, and the machining precision and efficiency can be improved.

The continuous feed mask electrochemical machining process has unique advantages. In this paper, a process equipment is designed to realize the continuous feed mask electrochemical machining.In this paper, the following aspects are studied systematically:

1. This paper introduces the principle and process of continuous feed mask electrochemical machining.

2. The size of process equipment required in the design and processing process and the size of each component.

3. Check the strength requirements of each component in the process of processing.

4. Analyze the economy of its technological equipment.

In conclusion, the design of the continuous feed mask electrochemical machining process equipment mainly includes the following four aspects, Through the above research, we can simply understand the process equipment designed in this paper and the advantages and disadvantages of the process equipment.

Key words: continuous feed；mask electrochemical machining；ultra long distributed array microstructure.

目录

摘 要 2

ABSTRACT 3

第一章 绪论 1

1.1引言 1

1.2研究背景 2

1.3国内外研究现状 5

1.4课题研究的意义 9

1.5 本文主要研究内容 9

第二章 连续进给式掩膜电解加工方案设计 10

2.1掩膜电解加工原理 10

2.2连续进给的传动方案 11

2.2.1平移式传动 11

2.2.2阴极移动式传动 12

2.2.3对辊式传动 13

2.3本章总结 14

第三章 阳极传动装置设计 16

3.1 阳极传动减速器的设计简图 16

3.2 电动机的选择 16

3.3 传动比分配 17

3.4 动力运动参数计算 17

3.5 轴系零件的设计计算 19

3.5.1齿轮材料和热处理的选择 19

3.5.2齿轮几何尺寸的设计计算 19

3.5.3齿轮弯曲强度校核 21

3.5.4齿轮几何尺寸的确定 22

3.5.5齿轮的结构设计 22

3.5.6轴及设计计算 24

3.6轴承与联轴器的选择 26

3.6.1轴承的选择 26

3.6.2联轴器的选择 26

3.7润滑的选择确定 27

3.7.1润滑方式 27

3.7.2润滑油牌号及用量 27

3.8密封形式以及箱体尺寸的设计 27

3.8.1密封形式 27

3.8.2箱体主要结构尺寸设计 27

第四章 连续进给式掩膜电解加工机床的设计 29

4.1机床设计简图 29

4.2机床受力分析 29

4.2.1螺栓的强度校核 30

4.2.2主动轮的强度校核 30

4.3.机床及主要部件的尺寸 31

4.3.1主从动轮的尺寸 31

4.3.2进出液口的尺寸 31

4.3.3机床整体的尺寸 32

4.3.4上夹具的尺寸 33

4.3.5底座的设计 33

4.4整体机床设计图 34

4.5本章小结 35

第五章 经济性分析 36

5.1连续进给式掩膜电解加工机床设计总结 36

5.2整体机床的经济性分析 36

参考文献 38

致谢 41

第一章 绪论

1.1引言

掩膜电解加工是以电化学阳极溶解理论为原理，将工件按照模板的形状和大小加工成型的一种电解加工方法。掩膜电解加工示意图如图1-1所示。

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