论文总字数：33383字

摘 要

随着低温等离子体技术的发展，因其特有的高效、清洁、无污染优势，人们逐渐将其用于材料的表面处理，随着时代的进步和发展，人们对于材料的要求越来越高，孕育而生的一批用于材料处理的等离子体装置已经投入使用。为了提高DBD材料处理装置的处理均匀性、连续性和多样性，本文将设计一款能够添加不同反应气体的DBD连续往复材料处理装置，装置的设计包括电气系统、传动系统和驱动系统三个部分，同时对其放电的电学特性、光学特性以及改性效果进行分析，从而寻找最佳的处理参数，为之后的装置优化提供参考。

首先对装置的电气系统和传动系统进行设计。参考前人的设计理念，通过比较同轴电极与平板电极和阻挡介质的优势与劣势，并且分析其经济性因素，以放电均匀性为要求设计一种柱—板放电电极；在传动系统的设计部分主要是比较了常用的传送锟和滚珠丝杠两种方式，由于滚珠丝杠的高性价比和体积小等优点，因此本文选取滚珠丝杠作为传送装置。合理选择滚珠丝杠的各种参数。

其次对装置的驱动系统进行设计。在电机选型方面比较了步进电机和伺服电机的优缺点和经济性，选取步进电机来驱动滚珠丝杠，通过计算步进电机的负载扭矩来确定步进电机的型号；在控制器方面参考前人经验选择单片机来控制步进电机，设计人机交互电路控制电机的转速、方向和启停。单片机的输出信号需经过放大电路放大才能被步进电机所接受，因此根据步进电机型号选择了一款驱动器；为了隔离单片机和电动机之间的干扰避免烧坏单片机，在两者之间加上了光耦隔离电路。

最后，设计出实验室使用的实验系统，选取环氧树脂板作为处理对象，用纳秒脉冲电源作为激励源，用示波器收集放电的电压电流参数，用光谱仪收集放电时产生的光谱数据，通过水接触角测量仪检测材料的处理效果。实验选取激励源的电压幅值和输入的气体浓度作为变量，采用控制变量法进行实验，对每组实验进行origin分析，计算放电的平均功率，比较放电的均匀性、效率和改性效果，得出当放电电压为12kV，辅气路进气量为10mL/min时放电效果和表面改性为本实验最佳参数。

关键词：介质阻挡放电 改性装置 水接触角 表面改性

Abstract

With the development of low temperature plasma technology, because of its characteristic of efficient, clean and pollution-free advantages, people gradually be used for surface treatment of materials. Along with the progress and development of The Times, people more and more high to the requirement of material, the inoculation of a batch of plasma device has been put into use for materials processing. In order to improve the processing uniformity, continuity and diversity of DBD material processing unit, this paper will design a DBD continuous reciprocating material processing unit that can add different reaction gases. The design of the device includes electric system, transmission system and drive system. At the same time, the electrical characteristic, optical characteristic and modification effect of its discharge are analyzed, so as to find the best processing parameters, and provide reference for the subsequent device optimization.

First, the electrical system and transmission system of the device are designed. The advantages and disadvantages of coaxial electrode and plate electrode and barrier medium are compared by referring to the design concept of predecessors. Based on the analysis of the economic factors, a new type of electrode is designed based on the uniformity of discharge. In the design part of the transmission system, the common transmission roller and ball screw are compared. Due to the advantages of high cost performance and small size of ball screw, ball screw is selected as the transmission device in this paper. Reasonable selection of ball screw parameters.

Secondly, the driving system of the device is designed. In the aspect of motor selection compared the advantages and disadvantages of stepper motor and servo motor and economy. Select a stepping motor to drive the ball screw. The model of the stepper motor is determined by calculating the load torque of the stepper motor. In terms of controller, MCU is selected to control stepper motor according to the previous experience. The design of human-computer interaction circuit to control the motor speed, direction and stop. Enlarge the output signal to be amplified circuit microcontroller can be accepted by the stepper motor. So according to the model chose a stepper motor drives. In order to isolate the interference between the MCU and the motor and avoid burning the MCU, an optical coupler isolation circuit is added between the two.

Finally, the experimental system used in the laboratory is designed. Epoxy resin plate is selected as the treatment object. Nanosecond pulse power supply is used as the excitation source. The discharge voltage and current parameters are collected by oscilloscope. A spectrograph is used to collect spectral data generated during discharge. The treatment effect of the material was detected by water contact Angle measuring instrument. The voltage amplitude of the excitation source and the concentration of the gas input were selected as the variables. The control variable method was used in the experiment. Origin analysis was performed for each group of experiments. Calculate the average discharge power. The uniformity, efficiency and modification effect of discharge were compared. It is concluded that the discharge effect and surface modification are the best parameters in this experiment when the discharge voltage is 12kV and the inlet volume of auxiliary gas is 10mL/min.

Keywords: Dielectric barrier discharge；Modification device；The water contact Angle；The surface modification

目 录

摘要 i

Abstract ii

第一章 绪论 1

1.1课题的研究背景及意义 1

1.2研究现状 2

1.2.1不同反应气体下介质阻挡放电及改性应用现状 2

1.2.2介质阻挡放电改性装置研究现状 4

1.2.3 研究现状总结 8

1.3本课题的研究内容 8

第二章 装置总体方案设计 10

2.1装置的整体结构设计 10

2.2电气系统设计方案 10

2.2.1反应器结构设计 10

2.2.2阻挡介质的选择 12

2.3传动系统的设计方案 13

2.3 本章小结 15

第三章 运动控制系统设计 17

3.1电机的选型 17

3.1.1电动机的类型确定 17

3.1.2电机参数选型计算 18

3.2控制器的设计 19

3.2.1LCD1602显示模块 20

3.2.2键盘电路 21

3.2.3晶振电路 21

3.2.4复位电路 22

3.2.5总结 22

3.3电机驱动器选择 22

3.4光耦隔离 23

3.5 本章小结 24

第四章 装置放电特性测量及诊断系统 25

4.1装置实验平台搭建 25

4.2电学特性诊断 26

4.3光学特性诊断 27

4.4材料表面特性测试和判断方法 27

4.4.1水接触角测量方法 28

4.4.2亲水性和憎水性的判断方法 28

第五章 放电特性实验及表面改性效果 30

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