论文总字数：28600字

摘 要

介质阻挡放电(DBD)作为一种在低压下产生低温等离子体的方式，在材料表面处理、改性以及环境保护等方面有着广阔应用。对于氮气DBD的研究已经有许多研究成果，但是单纯的氮气DBD放电无法满足DBD许多实际的应用，在氮气中添加H₂O、O₂、NH₃会增加活性粒子浓度，使得氮气DBD应用范围更加广泛。

本次论文自行设计介质阻挡放电的实验装置系统，对实验数据进行采集，分别对纯氮气和添加H₂O、O₂、NH₃情况下的电压-电流波形、瞬时最大功率、能量等电学特性以及发光特性、光谱特性等光学特性的分析，讨论添加活性成分对放电的影响。首先研究了纯氮气条件下不同电压和频率下放电数据，随着电压的提高，相关电学特性的数据增大，放电均匀性提高，N相关光谱强度增大，放电也变得更加剧烈；对于O₂，测量添加0.2%，0.5%，0.8%氧气含量下的氮气的放电数据，添加0.2%的O₂后，相关电学数据较纯氮气有明显的增大，继续增加氧气含量后变化幅度不明显。随着氧气含量的增加，放电均匀性先变差后变好，放电产生的活性粒子浓度先增加后减小，当添加O₂比例为0.2%时，此时相关电学参数取得最大值，O活性粒子的浓度也达到最大，活性最好；对于H₂O，测量了添加比例为0.2%时的相关放电数据，加入H₂O后，相关电学参数会有一定程度减弱，但均匀性有明显的提高，OH光谱强度较纯氮气也有一定的提升；对于NH₃，选定的添加比例为0.1%，加入NH₃后，电学参数明显减弱，整体均匀性变好，反应会产生NH活性粒子，但N相关光谱强度有明显的减弱。

关键词：介质阻挡放电 等离子体 活性粒子 电学特性 光学特性

Effects of different active ingredients (H₂O、O₂、NH₃) on the discharge characteristics of nitrogen DBD

Abstract

Dielectric barrier discharge (DBD), as a method of generating low-temperature plasma at low pressure, has broad applications in material surface treatment, modification and environmental protection. There have been many research results on the research of nitrogen DBD, but the pure nitrogen DBD discharge cannot meet many practical applications of DBD. The addition of H₂O、O₂、NH₃ to nitrogen will increase the concentration of active particles, making the application range of nitrogen DBD more extensive.

In this paper, the experimental device system of dielectric barrier discharge is designed by ourselves, and the experimental data is collected. The voltage-current waveform, instantaneous maximum power, energy, luminescence characteristics and spectral characteristics of pure nitrogen and H₂O, O₂, NH₃ are added respectively. First, the discharge data at different voltages and frequencies under pure nitrogen was studied. As the voltage increases, the relevant electrical data increases, the N-related spectral intensity increases, and the discharge becomes more intense. For O₂, the relevant electrical parameters are significantly increased after adding 0.2% O₂, and the range of change is not obvious after continuing to increase the oxygen content. With the increase of oxygen content, the concentration of active particles generated by the discharge increases first and then decreases. When the proportion is 0.2%, the relevant electrical parameters attain maximum. The concentration of O active particles also reaches the maximum; For H₂O, the relevant discharge data when the addition ratio is 0.2% is measured. After adding H₂O, the relevant electrical parameters will be somewhat reduced, but the uniformity is significantly improved, and the OH spectral intensity Purified nitrogen also has a certain improvement; for NH₃, the selected addition ratio is 0.1%. After NH₃ is added, the electrical parameters are significantly weakened and the overall uniformity becomes better. The reaction will produce NH active particles, but the N-related spectral intensity has obvious Weaken.

Key words: Dielectric barrier discharge; Plasma; Active particles;

Electrical characteristics; Optical characteristics

目录

摘 要 I

Abstract II

第一章 绪论 1

1.1等离子体概述及发生方式 1

1.1.1 等离子体概述 1

1.1.2 低温等离子体的产生 1

1.2 研究背景 3

1.3 研究现状 4

1.4本论文主要研究内容 7

第二章 实验装置及测量系统 8

2.1实验装置接线及装置介绍 8

2.2 实验方法 13

2.3 DBD参量计算 13

2.3.1 气体参量计算 13

2.3.2电学参量计算 14

2.3.3 均匀度分析 15

2.4 本章小结 15

第三章 氧气添加对氮气DBD的影响 16

3.1 氮气DBD放电特性 16

3.1.1电学特性 16

3.1.2光学特性 20

3.2不同氧气含量下氮气DBD放电特性的研究 23

3.2.1电学特性 23

3.2.2 光学特性 25

3.3 本章小结 28

第四章 水蒸气和氨气添加对氮气DBD的影响 29

4.1 水蒸气添加对氮气DBD的影响 29

4.1.1电学特性 29

4.1.2 光学特性 31

4.2氨气添加对氮气DBD的影响 33

4.2.1 电学特性 33

4.2.2 光学特性 34

4.3 本章小结 36

第五章 总结 37

参考文献 39

致谢 42

第一章 绪论

1.1等离子体概述及发生方式

1.1.1 等离子体概述

等离子体也被称作电浆，物质的原子在被加热到一定程度后，外层电子脱离原先稳定的运行轨迹，变成自由电子。电离发生后，离子、自由电子和未电离的中性粒子参杂在一起，正负电荷总量相等，整体上呈现为电中性，所以被称作等离子体^[1-3]。

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